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发明名称
Confocal microscope with movable scanning table
摘要
申请公布号
EP0871052(B1)
申请公布日期
2004.01.14
申请号
EP19980105816
申请日期
1998.03.31
申请人
CARL ZEISS;CARL-ZEISS-STIFTUNG
发明人
DERNDINGER, EBERHARD;OTT, PETER;CZARNETZKI, NORBERT;SCHERUEBL, THOMAS, DR.
分类号
H01J37/20;G02B21/00;H01J37/28;H01L21/66;(IPC1-7):G02B21/00;G01N21/89
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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