High resolution analytical probe station

摘要

A method and system for probing with electrical test signals on an integrated circuit specimen (50) using a scanning electron microscope (SEM) positioned for observing a surface of the specimen exposing electrically conductive terminals on the specimen. A motorized manipulator (18-23) remotely controlled by a controller manipulates a plurality of probes (24) positionable on the surface of the specimen for conveying and acquiring electrical test signals inside a vacuum chamber. The controller communicates with the motorized manipulator for positioning the plurality of probes, and for applying electrical test signals to the terminals on the specimen using the image acquired by the controller to identify the electrically conductive terminals from the conductive path indicia of the surface of the specimen observed with the scanning electron microscope.