发明名称 Method of producing microstructure, and method of producing liquid discharge head
摘要 <p>The present invention discloses a method of producing a liquid flow path shape capable of refilling ink at a high speed by optimizing a three-dimensional shape of the liquid flow path and suppressing the vibration of a meniscus and a head thereof. According to the invention, a pattern to form the liquid flow path to be formed on a substrate with a heater is formed by a positive photosensitive material in a two-layered structure of upper and lower layers and the lower layer is used for forming the liquid flow path after being thermally crosslinked. <IMAGE> <IMAGE></p>
申请公布号 EP1380425(A1) 申请公布日期 2004.01.14
申请号 EP20030015760 申请日期 2003.07.10
申请人 CANON KABUSHIKI KAISHA 发明人 KUBOTA, MASAHIKO;HIYAMA, WATARU;SHIBA, SHOJI;ISHIKURA, HIROE;OKANO, AKIHIKO
分类号 B41J2/05;B41J2/14;B41J2/16;G03F7/032;G03F7/039;G03F7/26;G03F7/32;(IPC1-7):B41J2/16 主分类号 B41J2/05
代理机构 代理人
主权项
地址