APPARATUS AND METHOD FOR LAMINATING DRY FILM USING MICROWAVE

摘要

PURPOSE: An apparatus and a method are provided to reduce a defective ratio and achieve improved quality of the device. CONSTITUTION: An apparatus comprises a microwave oscillating unit(216) having an inner surface coated with a reflective film for heating a dry film; a transfer roller(218) for transferring the dry film heated by the microwave oscillating unit; a frame(230) for performing a laminating process on a substrate(P) being transferred by the transfer roller; and a discharge unit for discharging the dry film liquefied by the microwave oscillating unit.