| 摘要 |
PURPOSE: A slit valve is provided to be capable of preventing the damage of encapsulating part, improving the endurance of parts, and reducing slit valve replacement time and cost by improving the structure of the encapsulating part. CONSTITUTION: A slit valve includes a valve housing. At this time, the valve housing includes the first housing bracket having the first wafer moving path(111) and the second housing bracket. The silt valve further includes a main shaft(200) prolonged from the valve housing, a blade assembly installed at the front portion of a main shaft for switching the first wafer moving path, and a valve driving part. Preferably, an sealing adaptor(140) is installed around the first wafer moving path of the first housing bracket.
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