CONTROLLER MODULE OF SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PURPOSE: A controller module of a semiconductor manufacturing apparatus is provided to be capable of reducing the volume of the apparatus and easily maintaining the apparatus. CONSTITUTION: A controller module of a semiconductor manufacturing apparatus is provided with a controller storing part(100) installed at the outer portion of the semiconductor manufacturing apparatus and a moving pedestal(200) for loading the controller storing part. At this time, a plurality of controllers are separately stored at the controller storing part. Preferably, the controller module further includes a sliding part installed at the upper portion of the moving pedestal for sliding the controller storing part.