| 摘要 |
PURPOSE: A wafer rotating apparatus is provided to be capable of improving the reliability of an equipment by exactly checking the rotation of a cylinder shaft and a wafer loading part using the first and second detecting part. CONSTITUTION: A wafer rotating apparatus(100) is provided with a wafer loading part(110) for loading a plurality of wafers, a rotation power generating apparatus(120) for rotating the wafer loading part, and a rotation shaft part(130). At this time, the rotation shaft part includes the first rotation shaft installed at the rotation power generating apparatus and the second rotation shaft installed at the wafer loading part. The wafer rotating apparatus further includes a coupling part(140) installed between the first and second rotation shaft, a housing(170) spaced apart from the lower portion of the wafer loading part, the first detecting part(150) installed at the rotation power generating apparatus, and the second detecting part(160) installed at the wafer loading part.
|
