发明名称 CARRYING VEHICLE, MANUFACTURING APPARATUS, AND CARRYING SYSTEM
摘要 PURPOSE: A carrying vehicle, a manufacturing apparatus, and a carrying system are provided to prevent pollution of manufactured articles by maintaining desirably the manufactured articles in the cleaned atmosphere. CONSTITUTION: A carrying vehicle includes a running unit, a cleaning unit, a housing section, a transfer port, and an air injecting section. The running unit runs along a predetermined carrying path. The cleaning unit(12) supplies cleaned air. The cleaned air is supplied to the housing section. Manufactured articles are housed in the housing section. The transfer port(11) is formed in a side of the housing. The manufactured article is loaded into or unloaded from the housing section through the transfer port. The air injecting section(19A) blows out air toward the transfer port.
申请公布号 KR20040004064(A) 申请公布日期 2004.01.13
申请号 KR20030041422 申请日期 2003.06.25
申请人 ADVANCED DISPLAY INC.;MURATA KIKAI KABUSHIKI KAISHA 发明人 ISHIHARA HIROYUKI;SHIMIZU TAKAO;NAKAO TAKASHI;TAHARA RYOSUKE;TAKEUCHI HIDETOSHI
分类号 H01L21/68;B01D50/00;H01L21/00;H01L21/677;(IPC1-7):H01L21/68 主分类号 H01L21/68
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