发明名称 AIR OPERATION VALVE DRIVING APPARATUS
摘要 PURPOSE: An air operation valve driving apparatus is provided to be capable of detecting and checking the driving state of an air operation valve. CONSTITUTION: An air operation valve driving apparatus is provided with an air line(20) for flowing air, a fluid line(40) for flowing fluid, an air supply unit(24) for supplying air to the air line, and air operation valve(30) for controlling the fluid by using the air flowed to the air line. The air operation valve driving apparatus further includes a naked eye check cap(30a) installed at one side of the air operation valve for being moved up and down by the pressure of the air flowed into the air operation valve, a detecting part(30b) located at the upper portion of the naked eye check cap for detecting the operation state of the air operation valve according to the up/down state of the cap, and a controller(10) for controlling the air operation valve.
申请公布号 KR20040003472(A) 申请公布日期 2004.01.13
申请号 KR20020038187 申请日期 2002.07.03
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LIM, HYEON U
分类号 H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/02
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