发明名称 |
WAFER TRANSFER STATE CHECKING APPARATUS OF WAFER TRANSFER ROBOT AND METHOD THEREOF |
摘要 |
PURPOSE: A wafer transfer state checking apparatus of a wafer transfer robot and a method thereof are provided to be capable of detecting the contact between a robot arm and an unexpected wafer and generating an interlock signal when transferring an aiming wafer. CONSTITUTION: A wafer transfer state checking apparatus is provided with a transfer robot(10) having a robot arm(12) for transferring a wafer between a carrier(16) and a process module and a contact sensor(18) installed at the lower portion of the robot arm for detecting the contact state of an unexpected wafer. The wafer transfer state checking apparatus further includes a controller(20) for receiving a contact state detecting signal from the contact sensor and outputting an interlock generating signal and an alarm generation controlling signal.
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申请公布号 |
KR20040003309(A) |
申请公布日期 |
2004.01.13 |
申请号 |
KR20020037974 |
申请日期 |
2002.07.02 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE, JONG HWA |
分类号 |
H01L21/68;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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