发明名称 |
Electrostatic chuck and method of manufacturing the same |
摘要 |
Disclosed is an electrostatic chuck having a coating layer (3) surrounding an insulating layer (1,2) and the eletrodes (3) consists essentially of non-crystalline carbon (DLC) having electric resistivity ranging from 10 sup 8 to 10 sup 13 Omega-cm. The coating layer preferably contains 15-26 atom % of hydrogen. The coating layer preferably has an intensity ratio of 07-1.2, the intensity ratio being defined as a ratio of an intensity at 1360 cm<-1 >to another intensity at 1500 cm<-1 >when the said coating layer is subjected to Raman spectroscopic analysis. The coating layer is manufactured by the P-CVD process wherein hydrocarbon (CxHy) is introduced into a vacuum container and ionized therein by ionizing process and ionized hydrocarbon is deposited on the surface of the said conductive electrodes by apply thereto a predetermined pulse voltage within an after-glow time of smaller than 250 microseconds.
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申请公布号 |
US6678143(B2) |
申请公布日期 |
2004.01.13 |
申请号 |
US20010006657 |
申请日期 |
2001.12.10 |
申请人 |
GENERAL ELECTRIC COMPANY |
发明人 |
MASUDA SHINSUKE;FUJII KIYOTOSHI |
分类号 |
H01L21/683;(IPC1-7):H01R43/00 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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