| 摘要 |
PURPOSE: To provide a manufacturing method of a plasma display panel that includes an inspection process, which can feedback quickly the inspection result of a phosphor layer to a coating process of a phosphor material, and can determine the type of defects, and also, which is low in facility cost and running cost, and an inspection method and an inspection device for phosphor layer. CONSTITUTION: A phosphor paste 5a is coated on an inner surface of a cell 3. Next, a substrate 1 is moved with a constant speed to a CCD camera 13 by a conveyor 16. And also, LEDs 12a and 12b irradiate a visible light 14 on a part to be an inspection object of the substrate 1. This visible light 14 is a light of a wavelength not exciting the phosphor paste 5a to emit light, and becomes a reflected light 15 reflected by a liquid level of the phosphor paste 5a. Then, the CCD camera 13 takes images of the phosphor paste 5a, a data processing device processes the obtained image data, and the quality of a phosphor to be formed with drying of the phosphor paste 5a is judged before the phosphor layer is formed. |
