| 摘要 |
A device and method for monitoring variations in the distance between an object and a datum, comprising: a light source, an astigmatic system for projecting an astigmatic image of the light source onto the object, the astigmatic system including the datum; and image shape detector means for detecting changes of shape of the astigmatic image on the object due to the variation in the distance between the object and the datum, and for producing a monitor signal whose value is dependant on the shape of the astigmatic image on the object: the astigmatic system being arranged such that light reflected from the astigmatic image on the object passes back through the astigmatic system and is thereby projected onto a light receiving surface of the image shape detection means as an astigmatic image of the astigmatic image on the object; wherein the astigmatic system comprises a zone plate.
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