| 摘要 |
PURPOSE: A boat covered with an upper and lower cap is provided to be capable of reducing the number of side dummy wafers located at the upper and lower end portion of the boat and removing the powder particles existing at a wafer. CONSTITUTION: A vertical furnace boat is used for removing powder particles. After removing slots, each located at the upper and lower end portion of the boat, a pair of caps(S3,S4) made of the same material as the boat, are covered at the upper and lower end portion of the boat, so that the power particles are easily prevented. Preferably, the pair of caps are provided with the first and second cap. At this time, the first cap is used for preventing heat loss by thickly processing the uppermost portion of the first cap, preventing the crack phenomenon of a film due to thermal expansion by processing the other portion as a space, and uniformly flowing reaction gas to the boat. At the time, the second cap is used for preventing the generation of heat loss due to radiation.
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