ATMOSPHERIC PRESSURE PLASMA CLEANING APPARATUS

摘要

PURPOSE: An atmospheric pressure plasma cleaning apparatus is provided to prevent the generation of static electricity at the surface of a process object part, for restraining the process object part from being electrically impacted. CONSTITUTION: An atmospheric pressure plasma cleaning apparatus is provided with an electrode part having an upper and lower electrode(104,204) spaced apart from each other for passing a process object part(2), a power supply(300) for applying a predetermined power to the upper electrode in order to generate electric field between the upper and lower electrode, and an air supply part(106) installed at one side of the upper electrode for supplying clean air containing moisture to the upper portion of the process object part. The atmospheric pressure plasma cleaning apparatus further includes a reaction gas supply part(108) installed between the air supply part and the upper electrode for supplying reaction gas containing moisture to the upper portion of the process object part, and a reaction gas release part(110) installed at the other side of the upper electrode for pumping the clean air and the reaction gas to the outside.