| 摘要 |
1. Method for testing the tightness of capacitive sensors2.1. Known methods of seal testing cannot be used because of the extremely small volume of the sensor cavity or on wafer level. Other known methods of seal testing are only possible with high expenditure on safety because, for example, radio isotopes are used.2.2. Method for testing the tightness of capacitive sensors arranged in a hermetically sealed enclosure, in which the processed sensors are arranged in the form of a wafer, wherein the already sawn wafer bearing the sensors is immersed in a test fluid under defined conditions, the capacitance of each sensor is then measured and compared with the capacitance of reference sensors.2.3. The invention is especially suitable for testing the tightness of capacitive, hermetically sealed sensors.
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