发明名称 Positive type photosensitive polyimide resin composition
摘要 A positive type photosensitive resin composition which can be developed by an aqueous alkaline solution and which is excellent in the developability and the adhesion to a substrate, is presented. Namely, the present invention presents a positive type photosensitive polyimide resin composition characterized by comprising 100 parts by weight of a solvent-soluble polyimide having repeating units represented by the formula (1) and from 1 to 50 parts by weight of a polyimide precursor having repeating units represented by the formula (2), and by further containing an o-quinonediazide compound in an amount of from 1 to 100 parts by weight per 100 parts by weight of the total amount of the repeating units represented by the formula (1) and the repeating units represented by the formula (2):(wherein R<1 >and R<3 >are bivalent organic groups, from 1 to 90 mol % of R<1 >is a bivalent organic group having one or plural groups of at least one type selected from the group consisting of a phenolic hydroxyl group, a carboxyl group, a thiophenol group and a sulfonic group, and from 10 to 99 mol % is a bivalent organic group having no phenolic hydroxyl, carboxylic, thiophenol or sulfonic group, and R<2 >and R<4 >are tetravalent organic groups constituting a tetracarboxylic acid or its derivative).
申请公布号 US6677099(B1) 申请公布日期 2004.01.13
申请号 US20020148396 申请日期 2002.05.30
申请人 NISSAN CHEMICAL INDUSTRIES, LTD. 发明人 ISHII KAZUHISA;NAKAYAMA TOMONARI;NIHIRA TAKAYASU;FUKURO HIROYOSHI
分类号 C08K5/20;C08K5/28;C08L79/08;G03F7/023;H01L21/312;(IPC1-7):G03F7/023;G03F7/30 主分类号 C08K5/20
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