| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an excimer laser which hardly generates impurity gas and reaction products, improves workability, and achieves an insulator having an accurate shape. <P>SOLUTION: The excimer laser, comprising a laser medium containing halogen gas in a laser case, discharging electrode pair 3 for applying a high-voltage pulse to make the laser medium emit a laserbeam, and an insulator 2 for attaching the discharging electrode pair 3, wherein the insulator 2 is composed of an alumina sintered compact containing 90 to 97% of alumina and 3 to 10% of YAG(yttrium, aluminum, garnet), alumina has an average crystal grain size of 2 to 10 μm and the YAG has an average crystal grain size of 1.5 to 5 μmin the alumina sintered compact, and a ratio of the average crystal grain size of alumina to that of YAG is larger than 1 and smaller than 7. <P>COPYRIGHT: (C)2004,JPO |
