摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a TFT substrate that can reduce the number of photographing steps and improve productivity. <P>SOLUTION: The TFT substrate is provided with a gate electrode comprising a first metallic film 22 formed on a substrate 20 and a second metallic film 24 formed thereon, a gate pad comprising the second metallic film 24 formed on the substrate 20, an insulation film 26 that is formed on the substrate in a manner to partly expose the second metallic film 24 of the gate pad, semiconductor film patterns 28 and 30 formed on the insulation film 26 on the gate electrode, a source electrode 32a and a drain electrode 32b formed respectively on the semiconductor film patterns 28 and 30, a protection film pattern 34 that is formed as to have a contact hole exposing the drain electrode 32b and the second metallic film 24 of the gate pad respectively, and a first pixel electrode pattern 36 contact with the drain electrode 24 and a second pixel electrode pattern 36a contact with the second metallic film 24 of the gate pad on the protection film pattern 34. <P>COPYRIGHT: (C)2004,JPO</p> |