| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a proton neutralizer reactive with protons under relatively mild conditions such as storage of a resist material and efficiently preventing a dark reaction and having moderate reactivity without inhibiting a reaction of the protons with a base polymer during exposure and to provide a resist composition comprising the neutralizer. <P>SOLUTION: The proton neutralizer comprises a compound having two or more N-(<SP>t</SP>BOC) bonds in the molecule. The compound preferably has two or more nitrogen atoms in the molecule. The resist composition comprises the proton neutralizer. <P>COPYRIGHT: (C)2004,JPO |
