| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To record various identification information on a flat element by using a small number of photomasks. <P>SOLUTION: Distinct identification information is recorded on a plurality of flat elements. The identification information is a text string of a single or more digits. A method of recording comprises processes of (a) preparing a first photomask 62 having a shadowing pattern 62b for a blank region wherein the text string is to be recorded, and a second photomask having a shadowing pattern for two or more kinds of characters used in the text string; (b) forming a photoresist layer 61 on the front surface of the flat element 60; (c) exposing the regions other than the blank region in the photoresist layer 61 to light using the first photomask 62; and (d) forming latent images of two or more kinds of characters which constitute the text string, in the blank region of the photoresist layer 61, using the second photomask. <P>COPYRIGHT: (C)2004,JPO</p> |
