摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a high performance electron emitting device which has lower voltage and yet is capable of emitting electrons of higher luminance than a conventional electron emitting device and which is capable of using as a key device for a flat panel display, a camera device, and an electron beam device or the like. <P>SOLUTION: A membrane having space charge is formed precisely in a thickness of 50 nm or less on the surface of a conductive material on which irregularities and indefinite shape or fibrous materials are formed. As the above membrane, either of nitrogen, carbon, silicon, oxygen, or boron is used such as a compound of the group III atom and nitrogen atom such as aluminum nitride, boron nitride, boron aluminum nitride, gallium aluminum nitride, gallium boron nitride or the like, carbon boron nitride, boron carbide, carbon nitride, or oxide containing boron. <P>COPYRIGHT: (C)2004,JPO</p> |