| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a process for manufacturing a piezoelectric ceramic suitable as a laminated piezoelectric element such as a laminated actuator element, which enables use of an inexpensive metal as an internal electrode substantially without deteriorating its piezoelectric property. <P>SOLUTION: The piezoelectric element essentially comprising Pb<SB>A1</SB>[(Zn<SB>1/3</SB>Nb<SB>1/3</SB>)<SB>a1</SB>Ti<SB>b1</SB>Zr<SB>c1</SB>]O<SB>3</SB>or Pb<SB>A2</SB>[(Zn<SB>1/3</SB>Nb<SB>1/3</SB>)<SB>a2</SB>(Mg<SB>1/3</SB>Nb<SB>2/3</SB>)<SB>d2</SB>Ti<SB>b2</SB>Zr<SB>c2</SB>]O<SB>3</SB>, is manufactured. The starting materials used here are Pb<SB>3</SB>O<SB>4</SB>, zirconium oxide having a specific surface area of 20-50 m<SP>2</SP>/g and titanium oxide having an anatase ratio of ≥90% and a specific surface area of 10-50 m<SP>2</SP>/g, which are ground and mixed into a raw material mixture wherein the particle size at which the cumulative percentage reaches 90% is ≤1 μm. The degree of mixing of the raw material mixture is increased, which enhances solid-phase reaction at pre-baking and lowers the actual baking temperature. <P>COPYRIGHT: (C)2004,JPO |
