| 摘要 |
<P>PROBLEM TO BE SOLVED: To facilitate maintenance such as the replacement of a vessel by securing the effective height of the interior of a clean room to keep a ceiling filter stable, thereby securing sufficient illumination, hermeticity, and stable air flow distribution of clean air. <P>SOLUTION: A HEPA filter 2 having an outline that matches with the inner size of the vertical and horizontal separation of a ceiling frame shaped material 11 is detachably mounted and held on a bracket 6 attached to a connection of grids of the ceiling frame shaped material 11 disposed on the ceiling surface in the clean room vertically and horizontally at regular intervals, so that the ceiling filter 2 can be replaced from below, and the undersurface of the ceiling frame shaped material 11 is opened to house and hold an luminaire body 20. <P>COPYRIGHT: (C)2004,JPO |
