摘要 |
PROBLEM TO BE SOLVED: To provide a method of efficiently manufacturing a large-sized massive single crystal of a nitride of a group 13 element in the periodic table by a simple and economical process. SOLUTION: In a reaction vessel, the inner surface of which is composed of a group 4, 5, and 6, or 10 and 11 element, a polycrystalline nitride comprising secondary particles with an average particle diameter of≥1μm of a group 13 element which contains at least one element of the group 13 elements in the periodic table is supplied as a starting material into a material packing zone of the reaction vessel, a seed crystal is set in a crystal growth zone, and the crystal growth is taken place in the presence of a nitrogen-containing solvent. COPYRIGHT: (C)2004,JPO
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