发明名称 METHOD OF MANUFACTURING NITRIDE SINGLE CRYSTAL
摘要 PROBLEM TO BE SOLVED: To provide a method of efficiently manufacturing a large-sized massive single crystal of a nitride of a group 13 element in the periodic table by a simple and economical process. SOLUTION: In a reaction vessel, the inner surface of which is composed of a group 4, 5, and 6, or 10 and 11 element, a polycrystalline nitride comprising secondary particles with an average particle diameter of≥1μm of a group 13 element which contains at least one element of the group 13 elements in the periodic table is supplied as a starting material into a material packing zone of the reaction vessel, a seed crystal is set in a crystal growth zone, and the crystal growth is taken place in the presence of a nitrogen-containing solvent. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004002152(A) 申请公布日期 2004.01.08
申请号 JP20030046607 申请日期 2003.02.24
申请人 MITSUBISHI CHEMICALS CORP 发明人 ORITO FUMIO;KAWABATA SHINICHIRO;WADA TAKASHI
分类号 C30B29/38;C30B7/10;(IPC1-7):C30B29/38 主分类号 C30B29/38
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