| 摘要 |
PROBLEM TO BE SOLVED: To provide a system and a method, more efficient and simpler, for reducing or eliminating walk-off in an interferometer. SOLUTION: The interferometer 200 returns parallel beams that are subject to walk-off caused by reflector misalignment for an additional pass through the interferometer optical system and thereby eliminates beam walk-off. A return reflector 210 can be a plane mirror that directs returning beams to retrace paths through the interferometer optical system to combine and exit along the axis of the input beam. Separation optical system 320A and 320B can separate the combined beam from the input beam. Alternatively, a return reflector such as an isosceles prism 410A or a trapezoidal prism 410B reflects and offsets returning beams so that the combined beam is offset from the input beam. COPYRIGHT: (C)2004,JPO
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