发明名称 |
Temperature compensation mechanism for a micromechanical ring resonator |
摘要 |
There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate, the ring resonator comprising a central post (5) extending from the substrate along the axis of rotation, a free-standing oscillating structure (6) connected to the central post and including an outer ring (60) coaxial with the axis of rotation and connected to the central post by means of a plurality of spring elements (62), and electrode structures (9; 9*) disposed around the outer ring and connected to the integrated electronic circuit. The free-standing oscillating structure further comprises a plurality of thermally compensating members (65) which are adapted to alter a mass moment of inertia of the free-standing oscillating structure as a function of temperature so as to compensate for the effect of temperature on the resonant frequency of the ring resonator.
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申请公布号 |
US2004004520(A1) |
申请公布日期 |
2004.01.08 |
申请号 |
US20030650685 |
申请日期 |
2003.08.29 |
申请人 |
ETA SA FABRIQUES D'EBAUCHES |
发明人 |
GIOUSOUF METIN;KUCK HEINZ;PLATZ RAINER |
分类号 |
G04G3/00;B81B3/00;G01C19/56;G01C19/5684;G04F5/04;H03B5/30;H03B5/32;H03H9/24;(IPC1-7):H03B5/30 |
主分类号 |
G04G3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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