METHOD FOR MANUFACTURING ELECTRONIC COMPONENT, ELECTRONIC COMPONENT AND SURFACE ACOUSTIC WAVE FILTER

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an electronic component having an electrode film consisting ofαphase tungsten whose resistivity is small, film hardness is high and warp is little without the need of a special apparatus and without the need of expensive gas.

SOLUTION: The method for manufacturing the electronic component comprises an electrode film forming process for forming the electrode film consisting of theαphase tungsten on a substrate at the substrate temperature of 100-300°C by a sputtering method; a process for working the electrode film into a desired shape; and a process for heat-treating the electrode film.

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