发明名称 Reversed, double-helical bellows seal
摘要 A double bellows seal comprising a plurality of rings including first and second end rings, a middle ring, a first bellows, and a second bellows. The first bellows is formed from a flexible material that is sealingly connected between the first end ring and the middle ring, and it has a twist bias in a first rotational direction relative to an axis of the rings. The second bellows is formed from a flexible material that is sealingly connected between the second end ring and the middle ring. The second bellows has a twist bias in a second rotational direction relative to an axis of the rings that is opposite that of the first rotational direction.
申请公布号 US2004004702(A1) 申请公布日期 2004.01.08
申请号 US20030611275 申请日期 2003.06.30
申请人 NIKON CORPORATION 发明人 PHILLIPS ALTON HUGH;SUGIMOTO HIROSHI
分类号 F16J3/04;G03B17/04;G03F7/20;H01L21/027;(IPC1-7):G03B27/42 主分类号 F16J3/04
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