METHOD OF FORMING A SILICON NITRIDE DIELECTRIC LAYER

摘要

Methods of forming thin nitride dielectric layers for semiconductor devices are provided. Additionally, methods of forming capacitor structures utilizing thin nitride dielectric layers are provided. The thin nitride layers are formed by nitridizing the surface of a doped or undoped semiconductor substrate using a remote plasma nitridization or a rapid thermal nitridization to form a first growth of silicon nitride. A self-limiting second growth of silicon nitride is formed using a remote plasma nitridization. The resulting silicon nitride layers exhibit improved dielectric and leakage characteristics.