PLANAR NANOWIRE BASED SENSOR ELEMENTS, DEVICES, SYSTEMS AND METHODS FOR USING AND MAKING SAME

摘要

Sensor elements and devices that incorporate those elements are provided, where the sensor comprises a thin semiconductor nanowire (202) that is disposed upon, and integral to, an insulating substrate (204), where the nanowire (202) is electrically coupled to a sensing surface (210) that binds or otherwise interacts with an analyte (114) of interest to yield a measurable effect on the nanowire element (202). The methods utilize extremely thin semiconductor (020) on insulator substrates (204) to provide nanowire dimensions for sensing elements that are fabricated using conventional semiconductor fabrication processes.