| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To facilitate a so-called application to online evaluation by dispensing with enlarging a work area for a test piece nor separating an evaluated part from the test piece even if a high-precision X-ray spectroscopic evaluation is performed with a high spatial resolution is kept. <P>SOLUTION: In an X-ray spectroscopic evaluation method, a test piece is irradiated with electron beam for X-ray spectroscopic evaluation. There are provided a removing work step in which at least a part of an electron scattering region adjacent to the evaluated part of the test piece is hollowed into a concave shape, an embedding work step in which a part of or the entire hollow part 12 formed in the removing work step is covered with a material 13 of an element different from that constituting the evaluated part, and an evaluation step in which the evaluated part after the embedding work step is irradiated with electron beam for X-ray spectroscopic evaluation. <P>COPYRIGHT: (C)2004,JPO</p> |
