| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared sensor of high sensitivity. SOLUTION: A support body for supporting a sensor on a hollow structure is made very thin compared to a conventional structure such that a cross sectional area is greatly reduced, resulting great reduction of the thermal conductance. As a result, the infrared sensor of high sensitivity can be obtained. In the present invention, an insulating layer of the support body region is etched to allow embedding of a sacrificing silicon layer therein. An aspect ratio of the insulating layer RIE for forming a support leg is greatly reduced. This facilitates a process, and further reduces a cross sectional area of the support leg as a side effect, thereby the sensitivity can be made high. COPYRIGHT: (C)2004,JPO
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