MASTER OPTICAL DISK MANUFACTURING METHOD, OPTICAL DISK AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To solve the problem wherein if a PEB (post-exposure bake) conditions are set to improve pit edge shape, slippage is generated in the shape of a long and short pit, from the difference in the amount of spreads of acid generated in a exposure section, when recording PWM(pulse width modulation) signal pit, using chemically amplified resist with an electron beam recording device.

SOLUTION: The pit shape is tailored to a prescribed shape in the PEB (post-exposure bake) conditions for improving the pit edge geometry by carrying out exposure registration with a multi-pulse signal.

COPYRIGHT: (C)2004,JPO