发明名称 MANUFACTURING METHOD OF PLASMA DISPLAY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a plasma display device which is of high quality without having yellowing phenomenon by effectively carrying out removal of organic materials and etching of the surface of the substrate. SOLUTION: In manufacturing the front panel of a plasma display device, the organic materials are removed in a closed atmosphere using a solution containing ozone, and then, cleaning and etching process for etching the surface of the substrate is carried out and subsequently a transparent electrode is formed. Thereby, since the organic materials and the surface Sn layer are removed before the formation of the transparent electrode, defective formation of the transparent electrode due to the organic materials is reduced, and since the Sn layer on the surface of the substrate is completely removed, Sn layer does not exist even under the transparent electrode. Thereby, the yellowing phenomenon due to oxidation-reduction reaction of Ag and Sn in forming the bus electrode after the formation of the transparent electrode can be completely prevented. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004006173(A) 申请公布日期 2004.01.08
申请号 JP20020161210 申请日期 2002.06.03
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 ASHIDA HIDEKI;TSUJI HIROYASU;SUMITA KEISUKE;ADACHI DAISUKE
分类号 H01J9/02;H01J9/38;H01J11/02;H01J11/12;H01J11/22;H01J11/24;H01J11/26;H01J11/34;(IPC1-7):H01J9/02 主分类号 H01J9/02
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