摘要 |
PROBLEM TO BE SOLVED: To provide a plasma display device which is of high quality without having yellowing phenomenon by effectively carrying out removal of organic materials and etching of the surface of the substrate. SOLUTION: In manufacturing the front panel of a plasma display device, the organic materials are removed in a closed atmosphere using a solution containing ozone, and then, cleaning and etching process for etching the surface of the substrate is carried out and subsequently a transparent electrode is formed. Thereby, since the organic materials and the surface Sn layer are removed before the formation of the transparent electrode, defective formation of the transparent electrode due to the organic materials is reduced, and since the Sn layer on the surface of the substrate is completely removed, Sn layer does not exist even under the transparent electrode. Thereby, the yellowing phenomenon due to oxidation-reduction reaction of Ag and Sn in forming the bus electrode after the formation of the transparent electrode can be completely prevented. COPYRIGHT: (C)2004,JPO
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