发明名称 |
Carrier head with flexible membrane |
摘要 |
A carrier head for chemical mechanical polishing of a substrate has a flexible membrane extending beneath a base to define a chamber. The flexible membrane provides a substrate receiving surface, and can be configured so that a pressure profile applied to a substrate is substantially insensitive to retaining ring wear.
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申请公布号 |
US2004005842(A1) |
申请公布日期 |
2004.01.08 |
申请号 |
US20030409637 |
申请日期 |
2003.04.07 |
申请人 |
CHEN HUNG CHIH;ZUNIGA STEVEN M.;CHEBOLI RAMAKRISHNA |
发明人 |
CHEN HUNG CHIH;ZUNIGA STEVEN M.;CHEBOLI RAMAKRISHNA |
分类号 |
B24B41/06;B24B49/16;(IPC1-7):B24B1/00;B24B7/19 |
主分类号 |
B24B41/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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