| 摘要 |
<P>PROBLEM TO BE SOLVED: To eliminate an accelerated component and detect a yaw rate with high accuracy. <P>SOLUTION: The sensor includes a base plate 48, two beam structures 81 and 82 arranged above the base plate in a predetermined interval from the base plate to be adjacent with each other. The beam structures 81 and 82 each include a mass section slidable to a predetermined sliding direction parallel to a surface of the base plate. The first and second beam structures are also arranged so as to oscillate in an opposite direction along a predetermined oscillating direction. Because the beam structures 81 and 82 linearly oscillates in the predetermined direction, the accelerated component can be eliminated with high accuracy when detecting a difference in yaw rate respectively detected from the two beam structures. <P>COPYRIGHT: (C)2004,JPO |
