| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid chamber having a protective layer and a print head equipped with the fluid chamber. SOLUTION: The chamber 108 comprises a substrate 110, a chamber layer 120 formed on the substrate to define the sidewall 122 thereof and having an area in the range of about 1 square micrometer and about 10,000 square micrometer on the plane defined by the chamber surface 124, and an orifice layer 130 having a first orifice surface 131, a second orifice surface 132 and a hole 134 wherein the hole is provided, on the plane defined by the first orifice surface, with the orifice layer having an area smaller than that of the chamber, and a protective layer 140 deposited, through the hole, on the sidewall of the chamber layer, a part of the first orifice surface, the hole in the orifice layer and a part of the substrate. COPYRIGHT: (C)2004,JPO |
