| 摘要 |
PROBLEM TO BE SOLVED: To provide a multi-wire saw which has a bearing device with an improved wire guide roller. SOLUTION: The wire saw 1 is guided around the wire guide rollers 3 in multiple layers, and functions to cut a wafer from a workpiece. The wire guide rollers each have the rotatable bearing device 15, and the two adjacent wire guide rollers restrict a saw frame 14. Herein, the wire saw of this type has ceramic plain bearings 16, 17 for the rotative bearing of the wire guide rollers. COPYRIGHT: (C)2004,JPO |
