METHOD FOR AVOIDING SPONTANEOUS IGNITION OF COMBUSTIBLE DUST IN EXHAUST GAS TO BE TREATED, ITS APPARATUS AND SILICON WAFER OBTAINED BY THE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for avoiding spontaneous ignition of combustible dust in exhaust gas to be treated. SOLUTION: The dust is detained at at least one sintered filter part article which is attached to the inside of a pressure vessel 2 without damaging treatment parameters in treatment and has temperature stability until at least 250°C, and is inactivated by inverse jet by using oxygen-containing gas in the pressure vessel 2 after the completion of the treatment. COPYRIGHT: (C)2004,JPO