LITHOGRAPHY APPARATUS, MANUFACTURING METHOD OF DEVICE, AND DEVICE MANUFACTURED THEREBY

摘要

PROBLEM TO BE SOLVED: To correct the process dependency of a level sensor of at least two lithography projecting apparatus for each machine by calibrating the level sensor. SOLUTION: A calibration method comprises a step for measuring a second set of levelling data using a first lithography projecting apparatus for a reference substrate, a step for measuring a second set of levelling data using the first apparatus for a substrate processed following a selected process, a step for measuring a third set of levelling data using a second apparatus, a step for measuring a fourth set of levelling data using the second apparatus, and a step for calculating a set of parameters of level sensors corresponding to a difference of the level sensors between machines for the selected process. COPYRIGHT: (C)2004,JPO