发明名称 |
METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ELEMENT, AND LIQUID DROPLET JETTING RECORDING HEAD |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method by which a piezoelectric element can be manufactured at a low cost through a simple process. <P>SOLUTION: The formation of an upper electrode 42 is performed by transforming a liquid 2 containing fine metallic particles into a metallic film through heat treatment after the liquid 2 is applied directly to the surface of a piezoelectric layer 40 in a pattern by means of an ink-jet head 101. <P>COPYRIGHT: (C)2004,JPO |
申请公布号 |
JP2004006645(A) |
申请公布日期 |
2004.01.08 |
申请号 |
JP20030020804 |
申请日期 |
2003.01.29 |
申请人 |
SEIKO EPSON CORP |
发明人 |
IWASHITA SETSUYA;HASHIMOTO TAKASHI;HIGUCHI AMAMITSU;MIYAZAWA HIROSHI |
分类号 |
B41J2/01;B41J2/045;B41J2/055;B41J2/135;B41J2/14;B41J2/16;H01L21/8246;H01L27/105;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/29;H01L41/318;H01L41/331;H01L41/39 |
主分类号 |
B41J2/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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