| 摘要 |
PROBLEM TO BE SOLVED: To provide a metal/ceramic connection structure excellent in the possibility of high thermomechanical load. SOLUTION: This metal/ceramic connection body manufacturing method comprises the following manufacturing steps: (a) preparing three types of powder comprising metallic filler, ceramic filler, and organic precursor, (b) mixing the three types of powder, (c) filling the mixture in a mold enclosing a through-member formed of a metal with high melting point, (d) forming a green compact by pressing the mixture, (e) preparing a bake-finished ceramic compact having a sealed opening, (f) inserting the green compact into the opening, (g) thermally decomposing the green compact to produce a negative-shrunk compact so as to seal clearances between the ceramic body and the compact on one side and between the compact and the through-member on the other side, (h) impregnating the porous compact with sufficiently wet metal while heating to lower a porosity to at least 1/5 so as to form a vacuum-density metal composite material. COPYRIGHT: (C)2004,JPO |
