发明名称 IMAGING ARRAY AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a radiation detector for imaging array comprising a top gate thin film transistor (TFT). SOLUTION: The radiation detector (18) includes the top gate thin film transistor (28), and the TFT includes a source electrode (50), a drain electrode (52), a gate electrode (66), a primary dielectric layer (59) and a second dielectric layer (62). Extending therethrough of the second dielectric layer is carried out so that a front surface of the primary dielectric layer may be covered. The radiation detector also includes a capacitor (24) having electrodes (53, 68) and dielectric layer of duplicate at least. Dielectric layer (64) of the capacitor is formed in the second dielectric layer and one piece of the TFT. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004006780(A) 申请公布日期 2004.01.08
申请号 JP20030098710 申请日期 2003.04.02
申请人 GENERAL ELECTRIC CO <GE> 发明人 LEE JI UNG;ALBAGLI DOUGLAS;POSSIN GEORGE EDWARD;WEI CHING-YEU
分类号 G01T1/20;G01T1/24;H01L27/14;H01L27/146;H01L31/09;H04N5/32;(IPC1-7):H01L27/14 主分类号 G01T1/20
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