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发明名称
摘要
申请公布号
JP2004500703(A)
申请公布日期
2004.01.08
申请号
JP20010517406
申请日期
2000.07.12
申请人
发明人
分类号
H05H1/46;H01J37/32;H01L21/302;(IPC1-7):H01L21/306
主分类号
H05H1/46
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