PERFLUORINATED COMPOUND DECOMPOSITION DEVICE AND PERFLUORINATED COMPOUND TREATMENT SYSTEM USING IT

摘要

PROBLEM TO BE SOLVED: To provide a perfluorinated compound (PFC) decomposition device which realizes easy maintenance, mass treatment, and a low operation cost by directly connecting the device with an exhaust gas duct and adding electrical energy directly to the mixed exhaust gas containing a large volume of discharged PFC gas at normal temperature and pressure to decompose the PFC gas, and a PFC treatment system using the decomposition device.

SOLUTION: The PFC decomposition device has an earthed external electrode part 30 having an internal space through which the PFC gas flows, an internal electrode part 40 inserted into the internal space in the external electrode part 30 to form an reaction space between it and the external electrode part 30, and a high voltage supply part 50 generating an electron beam and applying a high frequency high voltage to the internal electrode part 40 so as to decompose the PFC gas in the reaction space.

COPYRIGHT: (C)2004,JPO