| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact movable stage capable of stable movement. SOLUTION: An xy movable body 19 is placed between drivers 12, 13, 14 on a pedestal 11 and drivers 28, 29, 30 on an upper panel 27 facing opposite to the drive elements 12, 13, 14. One end of a spring 50 is attached to the centroid of a triangle formed by attaching locations of the drivers 12, 13, 14 on the pedestal 11. The other end of the spring 50 is attached to the center of gravity of a triangle formed by attaching the locations of the drivers 28, 29, 30 on the upper panel 27. The xy movable body 19 is pushed by equal force from the drivers 28, 29, 30 and pressed to the drivers 12, 13, 14 due to the arrangement of the drivers and the mounting position of the spring 50. COPYRIGHT: (C)2004,JPO
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