| 摘要 |
PROBLEM TO BE SOLVED: To provide a testing device for electronic components such as IC chips capable of avoiding component damage at the contact of the component to a nozzle member and performing the test of the component more reliably. SOLUTION: On a nozzle member 60a, there are provided a nozzle part 610 for adsorbing the component, a nozzle shaft part 620 connected to the nozzle part 610, and a holding part 630 for holding the nozzle part 610 and the nozzle shaft part 620. While the nozzle part 610 is made movable only in a confined range axially against the holding part 630, there are provided a a first spring 651 for biasing at a projecting direction so as to resiliently keep the nozzle part 610 at a maximum projecting position, and a second spring 653 for applying the biasing force of the projecting direction to the nozzle part when the nozzle part 610 moved more than a prescribed amount of distance from the maximum projecting position at the anti-projecting direction. COPYRIGHT: (C)2004,JPO
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