Verfahren zur Herstellung von Monosilanen,申请号DE19986019948-传众专利搜索

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发明名称	Verfahren zur Herstellung von Monosilanen
摘要
申请公布号	DE69819948(D1)	申请公布日期	2004.01.08
申请号	DE19986019948	申请日期	1998.02.26
申请人	SHIN-ETSU CHEMICAL CO., LTD.	发明人	TSUKUNO, AKIHITO;SATOH, YUKINORI;MARUYAMA, MASAO;HARADA, KESAJI;TANAKA, SHOICHI;FURUYA, MASAAKI
分类号	B01J31/02;C07B61/00;C07F7/12;C07F7/16;(IPC1-7):C07F7/12	主分类号	B01J31/02
代理机构		代理人
主权项
地址

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