SLIT DIE COATER NOZZLE AND METHOD FOR PRODUCING COLOR FILTER USING NOZZLE

摘要

PROBLEM TO BE SOLVED: To make a coating in a uniform film thickness in a sheet coating device by a slit die coater nozzle having a manifold and a coating discharging slit and to provide the slit die coater nozzle in which the film thickness of an entire coating region including the thin film parts of both ends of a coating width has a small height difference.

SOLUTION: In the slit die coater nozzle having at least the manifold and the coating discharging slit, a shim opening side used for forming the slit is curved to protrude outside.

COPYRIGHT: (C)2004,JPO